【Member News】Shandong Liguang Microelectronics: A Successful Conclusion to SEMICON CHINA 2026!

日期：2026-03-31阅读：46

From March 25 to March 27, the highly anticipated SEMICON China 2026 was grandly held at the Shanghai New International Expo Center.

This annual event brought together top global industry leaders, domestic and international industry giants, and renowned experts.

Amid this congregation of industry powerhouses, Shandong Liguan showcased its core product—the 12-inch vertical furnace automatic wafer transfer system—making a stunning debut. With its independently developed, cutting-edge technology, Liguan left a highlight moment of its own at Hall N4.

On-site Coverage

Shandong Liguang’s furnace tube equipment features a fully self-developed robotic automatic control system, enabling high-precision and stable wafer transfer. The core control algorithms and motion components are entirely domestically produced. Its proprietary software platform supports intelligent scheduling, process closed-loop control, and data traceability. The temperature system employs multi-zone coordinated control technology, achieving industry-leading precision and uniformity. Overall, both key components and control software are fully self-controlled.

At the exhibition booth, the equipment attracted significant attention from domestic and international industry professionals, potential customers, partners, and upstream and downstream enterprises, who stopped by to inquire and learn more.

During the exhibition, Shandong Liguang’s booth was constantly bustling with visitors. Facing new and returning friends from home and abroad, the company’s staff and technical team welcomed every attendee with full enthusiasm.

Although the three-day event has concluded, Shandong Liguang’s journey of innovation continues to accelerate. Looking ahead, the company will continue to increase R&D investment, deepen collaboration with industry chain partners, and drive China’s semiconductor equipment industry to even higher levels.